Thin Film Processes II
Vossen, John L., Kern, Werner(eds.)
This book gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature.
Κατηγορίες:
Έτος:
1991
Εκδότης:
Elsevier
Γλώσσα:
english
Σελίδες:
893
ISBN 10:
0127282513
ISBN 13:
9780127282510
Αρχείο:
PDF, 22.19 MB
IPFS:
,
english, 1991